VIBRATION WAVE MOTOR AND OPTICAL DEVICE

Title:

VIBRATION WAVE MOTOR AND OPTICAL DEVICE

Document Type and Number:

WIPO Patent Application WO/2019/078239

Kind Code:

A1

Abstract:

A vibration wave motor, having: an element that is displaced by the application of a voltage; and an annular elastic body having a bottom surface that comes into contact with the element and a drive surface having a groove, the elastic body driving a moving element by a vibration wave produced on the drive surface by the displacement of the element. The element has a density of 4.2 to 6.0 × 103 kg/m3. The value of [(T/B) ÷ W] is in the range of 0.84 to 1.94, where T represents the depth of the groove, B represents the distance from the bottom part of the groove to the bottom surface, and W represents the radial width of the elastic body.

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Inventors:

ASHIZAWA TAKATOSHI (JP)

Application Number:

PCT/JP2018/038629

Publication Date:

April 25, 2019

Filing Date:

October 17, 2018

Export Citation:

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Assignee:

NIKON CORP (JP)

International Classes:

H02N2/12; G02B7/04; G02B7/08; H01L41/08; H01L41/09; H01L41/187; H02N2/16

Foreign References:

JP2016052188A	2016-04-11
JP2012039754A	2012-02-23
JPH0117354B2	1989-03-30

Other References: