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Title:
VIBRATOR ARRAY SENSOR
Document Type and Number:
WIPO Patent Application WO/2017/018307
Kind Code:
A1
Abstract:
A vibrator array sensor is provided with a support plate (1), and a piezoelectric laminate (2) formed by laminating a plurality of piezoelectric layers (21), and the piezoelectric laminate (2) is provided with a plurality of internal electrodes therein. The plurality of internal electrodes include a first-class internal electrode (15) having a first shape having a rectangular cutout at a first corner, and a second-class internal electrode (16) having a second shape having the rectangular cutout at a second corner, and are individually disposed at interfaces between the piezoelectric layers (21) such that the first-class internal electrodes (15) and the second-class internal electrodes (16) are alternately arranged. When the width of the internal electrode is denoted by W1, the depth thereof is denoted by D1, the length obtained by subtracting the width of the cutout from W1 is denoted by W, and the length obtained by subtracting the depth of the cutout from D1 is denoted by D, any of conditions of W/W1≤0.26 and D/D1≥0.91, 0.26

Inventors:
SAITO, Masashi (10-1, Higashikotari 1-chome, Nagaokakyo-sh, Kyoto 55, 〒6178555, JP)
Application Number:
JP2016/071348
Publication Date:
February 02, 2017
Filing Date:
July 21, 2016
Export Citation:
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Assignee:
MURATA MANUFACTURING CO., LTD. (10-1, Higashikotari 1-chome Nagaokakyo-sh, Kyoto 55, 〒6178555, JP)
International Classes:
H04R17/00; H01L41/047; H01L41/083; H01L41/09; H01L41/113
Foreign References:
JP2000117971A2000-04-25
JP2014068142A2014-04-17
JP2004140762A2004-05-13
Attorney, Agent or Firm:
FUKAMI PATENT OFFICE, P.C. (Nakanoshima Central Tower, 2-7 Nakanoshima 2-chome, Kita-ku, Osaka-sh, Osaka 05, 〒5300005, JP)
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