Title:
VIBRATOR MANUFACTURING METHOD, VIBRATOR, AND PHOTOMASK
Document Type and Number:
WIPO Patent Application WO/2004/083781
Kind Code:
A1
Abstract:
A ring type vibrator (R2), wherein a plurality of through-holes are formed in a ring. When the width (w) of the ring of the ring type vibrator is reduced due to a machining error in a production process, the diameter (d) of the through-holes is increased, and the mass of the ring type vibrator (R2) is remarkably reduced less than that of the ring type vibrator (R1) without through-holes. As the ratio of a reduction in the mass of the ring type vibrator to a reduction in the width (w) of the ring is increased, a variation in the natural frequency of the ring type vibrator is suppressed. As a result, the ring type vibrator (R2) can suppress the variation in natural frequency due to the machining error more than that of the ring type vibrator (R1).
Inventors:
ARAKI RYUTA (JP)
TAKEMOTO TSUYOSHI (JP)
TAKEMOTO TSUYOSHI (JP)
Application Number:
PCT/JP2004/000974
Publication Date:
September 30, 2004
Filing Date:
January 30, 2004
Export Citation:
Assignee:
SUMITOMO PRECISION PROD CO (JP)
ARAKI RYUTA (JP)
TAKEMOTO TSUYOSHI (JP)
ARAKI RYUTA (JP)
TAKEMOTO TSUYOSHI (JP)
International Classes:
G01C19/56; G01C19/5684; H01L41/09; H01L41/22; H01L41/332; H03H9/24; (IPC1-7): G01C19/56; G01P9/04; H01L41/113; H03H9/24
Foreign References:
| JP2000055669A | 2000-02-25 | |||
| JP2002071708A | 2002-03-12 | |||
| JP2003509670A | 2003-03-11 | |||
| JP2001281264A | 2001-10-10 | |||
| JPH07335908A | 1995-12-22 | |||
| JPH0875475A | 1996-03-22 |
Attorney, Agent or Firm:
Ueba, Hidetoshi (Kadono Bldg. 2nd Fl., 2-1, Tenma 2-chome, Kita-k, Osaka-shi Osaka, JP)
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