Title:
VIBRATOR UNIT, TARGET SUPPLY DEVICE AND EXTREME UV LIGHT GENERATION SYSTEM
Document Type and Number:
WIPO Patent Application WO/2016/084167
Kind Code:
A1
Abstract:
The vibrator unit according to an embodiment of the present invention is a vibrator unit (310, 320, 330) for applying vibration onto a target material (271) that is supplied inside a target flow path (FL), and equipped with a vibrating element (314) vibrating in response to an electric signal of a predetermined frequency which is input from the exterior. The resonance frequency of the vibrating element may be a frequency that is different from the predetermined frequency of the electric signal. In addition, the vibrator unit according to another embodiment of the present invention is equipped with a vibration transmission member (311, 331) in contact with a first member (265, 260) containing therein the target flow path, and the vibrating element (314) in contact with the vibration transmission member. The specific frequency in the first order mode of the vibration transmission member may be a frequency that is different from the resonance frequency of the vibrating element.
Inventors:
HIRASHITA TOSHIYUKI (JP)
Application Number:
PCT/JP2014/081259
Publication Date:
June 02, 2016
Filing Date:
November 26, 2014
Export Citation:
Assignee:
GIGAPHOTON INC (JP)
International Classes:
H05G2/00; H01L21/027
Foreign References:
| JP2014529840A | 2014-11-13 | |||
| JPS61152086A | 1986-07-10 | |||
| JPH05226717A | 1993-09-03 |
Attorney, Agent or Firm:
EBISU International Patent Office (JP)
エビス international patent firm (JP)
エビス international patent firm (JP)
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