VIBRATOR, VIBRATION SENSOR, AND ELECTRONIC DEVICE PROVIDED WITH VIBRATION SENSOR

WIPO Patent Application WO/2013/042601

A1

The present invention provides: a vibration sensor which does not change much in the sensitivity characteristics over time; a vibrator which is used for the vibration sensor; and an electronic device which is provided with the vibration sensor. The vibration sensor is provided with: a vibrator that has a laminated structure composed of a piezoelectric body, which is internally mounted with electrodes, and a pair of metal supporting plates that support the piezoelectric body; a circuit board that processes an output charge of the piezoelectric body, said output charge being generated by bending vibrations of the vibrator; and a sensor case that houses the vibrator and the circuit board and comprises a pair of supporting parts, which support the pair of metal supporting plates of the vibrator, and a space that is formed between the pair of supporting parts and allows the bending vibrations of the vibrator.

SHINODA SHIGEKI (JP)
SASAKI YASUHIRO (JP)
MIKAMI NOBUHIRO (JP)
KASAI SHIGERU (JP)
TAKATA SOICHIRO (JP)
TAKAHASHI MASATAKE (JP)

PCT/JP2012/073396

March 28, 2013

September 06, 2012

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NEC CORP (JP)
SHINODA SHIGEKI (JP)
SASAKI YASUHIRO (JP)
MIKAMI NOBUHIRO (JP)
KASAI SHIGERU (JP)
TAKATA SOICHIRO (JP)
TAKAHASHI MASATAKE (JP)

G01P15/09; G01H11/08; G01P15/08; H01L41/08; H01L41/09

WO2011043219A1

2011-04-14

JPH0568889B2	1993-09-29
JP2001102646A	2001-04-13
JP2006010521A	2006-01-12
JP2005159575A	2005-06-16
JP2011142587A	2011-07-21
JP2001211053A	2001-08-03
JP2001521314A	2001-11-06

SHIMOSAKA, NAOKI (JP)
Naoki Shimosaka (JP)

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