Title:
VIBRATORY GYROSCOPE
Document Type and Number:
WIPO Patent Application WO/2011/145543
Kind Code:
A1
Abstract:
Provided is a vibratory gyroscope that is smaller than those of the conventional art, that minimizes variations in machining errors in mass detection sections, and that has a configuration that enables the accuracy of matching the natural frequencies of a plurality of mass detection sections, and the accuracy of angular velocity detection to be increased. The vibratory gyroscope (50) is configured in such a manner that: support parts (21) in fixed structure parts for detection(2A, 2B) are each positioned between three drive mass sections (13A to 13C) that are adjacent to each other along the Y-axis of a Cartesian form in which the normal direction of the main surface of a lid plate (50A) is regarded as the Z-axis; detection mass sections (17A to 17D) are each positioned between the adjacent drive mass sections (13A to 13C) and the support parts (21); and comb electrodes (23) in the fixed structure parts for detection (2A, 2B) are each positioned between the adjacent support parts (21) and the detection mass sections (17A to 17D).
Inventors:
MOCHIDA Yoichi (10-1, Higashikotari 1-chome, Nagaokakyo-sh, Kyoto 55, 〒6178555, JP)
Application Number:
JP2011/061145
Publication Date:
November 24, 2011
Filing Date:
May 16, 2011
Export Citation:
Assignee:
Murata Manufacturing Co., Ltd. (10-1, Higashikotari 1-chome Nagaokakyo-sh, Kyoto 55, 〒6178555, JP)
株式会社村田製作所 (〒55 京都府長岡京市東神足１丁目１０番１号 Kyoto, 〒6178555, JP)
株式会社村田製作所 (〒55 京都府長岡京市東神足１丁目１０番１号 Kyoto, 〒6178555, JP)
International Classes:
G01C19/56
Attorney, Agent or Firm:
Kaede Patent Attorneys' Office (1-4-34, Noninbashi Chuo-ku, Osaka-sh, Osaka 11, 〒5400011, JP)
Claims: