Title:
VIEWING WINDOW CLEANING APPARATUS
Document Type and Number:
WIPO Patent Application WO2004026096
Kind Code:
A3
Abstract:
A viewing port for a processing chamber is provided that includes a viewing window cleaning apparatus, a viewing window, and a mounting, where the viewing window cleaning apparatus is coupled to the mounting and disposed between the viewing window and the process chamber, and is configured to form a cleaning plasma in a cleaning plasma region of the mounting. In addition, the mounting can be configured to reduce a number of by-products from a process chamber on the viewing window by preventing them from propagating to the window.
Inventors:
FINK STEVEN T (US)
Application Number:
PCT/US2003/026302
Publication Date:
July 08, 2004
Filing Date:
September 22, 2003
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
FINK STEVEN T (US)
FINK STEVEN T (US)
International Classes:
C03C15/00; C23C16/44; C23F1/00; H01J37/32; H01L21/00; A47L; (IPC1-7): C03C15/00; C23F1/00; H01L21/00
Foreign References:
| US5290383A | 1994-03-01 | |||
| US6503364B1 | 2003-01-07 | |||
| JP2001077092A | 2001-03-23 | |||
| US6071375A | 2000-06-06 | |||
| US6306246B1 | 2001-10-23 | |||
| US5824158A | 1998-10-20 |
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