Title:
VIEWPORT FOR PLASMA MONITORING, PLASMA GENERATOR COMPRISING SAME, AND PLASMA MONITORING METHOD
Document Type and Number:
WIPO Patent Application WO/2024/039060
Kind Code:
A1
Abstract:
Disclosed are a viewport for plasma monitoring, a plasma generator comprising same, and a monitoring method. The viewport for plasma monitoring may comprise a transparent substrate and a transparent detection unit formed thereon and be arranged on the outside of a plasma chamber such that the transparent substrate enables observation of the inside of the plasma chamber while the transparent detection unit measures the electromagnetic field generated by plasma in the plasma chamber.
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Inventors:
KIM JONG SIK (KR)
KIM YONG HYUN (KR)
KIM DAE CHUL (KR)
KIM YOUNG WOO (KR)
PARK JONG BAE (KR)
SHIN JONG HYUN (KR)
KIM YONG HYUN (KR)
KIM DAE CHUL (KR)
KIM YOUNG WOO (KR)
PARK JONG BAE (KR)
SHIN JONG HYUN (KR)
Application Number:
PCT/KR2023/009305
Publication Date:
February 22, 2024
Filing Date:
July 03, 2023
Export Citation:
Assignee:
KOREA INST OF FUSION ENERGY (KR)
International Classes:
H01J37/32; H05H1/00
Foreign References:
| JP2010171302A | 2010-08-05 | |||
| KR20140138077A | 2014-12-03 | |||
| KR20140102686A | 2014-08-22 | |||
| KR20190119660A | 2019-10-22 | |||
| KR20120032101A | 2012-04-05 |
Attorney, Agent or Firm:
NAM, Gun Pil et al. (KR)
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