VINYLPHENYLPROPIONIC ACID DERIVATIVES, PROCESSES FOR PRODUCTION OF THE DERIVATIVES, POLYMERS THEREOF AND RADIOSENSITIVE RESIN COMPOSITIONS

Title:

VINYLPHENYLPROPIONIC ACID DERIVATIVES, PROCESSES FOR PRODUCTION OF THE DERIVATIVES, POLYMERS THEREOF AND RADIOSENSITIVE RESIN COMPOSITIONS

Document Type and Number:

WIPO Patent Application WO/2001/036370

Kind Code:

A1

Abstract:

Vinylphenylpropionic acid derivatives; processes for producing the derivatives; polymers of the same; and radiosensitive resin compositions containing the polymers. The above polymers exhibit low radiation absorption and are useful as the resin component of radiosensitive resin compositions particularly suitable for chemically amplified resists. For example, t-butyl 4-vinylphenylpropionate is produced by (1) reacting t-butyl bromoacetate with tri(n-butyl)phosphine to obtain a quaternary phosphonium salt, (2) reacting this salt with a base to obtain a phosphorus ylide, (3) reacting this ylide with 2,4,6-tris(3',5'-di-t-butyl-4'-hydroxybenzyl)methyl-styrene to obtain a quaternary phosphonium salt, and (4) hydrolyzing this salt.

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Inventors:

WANG YONG (JP)
MUTSUGA YASUAKI (JP)
SHIMIZU SHIGEO (JP)
SHIMOKAWA TSUTOMU (JP)
KUMANO ATSUSHI (JP)

Application Number:

PCT/JP2000/007950

Publication Date:

May 25, 2001

Filing Date:

November 10, 2000

Export Citation:

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Assignee:

JSR CORP (JP)
WANG YONG (JP)
MUTSUGA YASUAKI (JP)
SHIMIZU SHIGEO (JP)
SHIMOKAWA TSUTOMU (JP)
KUMANO ATSUSHI (JP)

International Classes:

C07C67/343; C07C69/618; C07D309/12; C08F30/02; G03F7/004; G03F7/039; (IPC1-7): C07C69/618; C07C67/343; C08F212/14; C08L25/18; G03F7/039

Foreign References:

JPH0561197A	1993-03-12
JPH05279425A	1993-10-26

Other References:

FAIZ AHMED KHAN ET AL.: "A novel Sm(II)-induced route to highly substituted benzannulated cyclooctanol derivatives", SYNLETT, August 1997 (1997-08-01), pages 995 - 997, XP002936585
L. ANGIOLINI ET AL.: "Synthesis and characterization of polystyrenes containing side-chain tributyltin carboxylate moieties linked ti the aromatic ring through a 1,2-ethylene spacer", POLYMER, vol. 41, no. 11, 2000, pages 3913 - 3924, XP002936586
See also references of EP 1231205A4

Attorney, Agent or Firm:

Ohshima, Masataka (Yotsuya 4-chome Shinjuku-ku Tokyo, JP)

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