Title:
VISCOUS SOLUTION APPLICATION APPARATUS AND VISCOUS SOLUTION APPLICATION METHOD
Document Type and Number:
WIPO Patent Application WO/2017/164565
Kind Code:
A1
Abstract:
The present invention relates to a viscous solution application apparatus and a viscous solution application method and, more specifically, to a viscous solution application apparatus and a viscous solution application method enabling a viscous solution to be applied on a precise area of a material such as a semiconductor component and at a precise volume. A viscous solution application apparatus and a viscous solution application method, according to the present invention, enable precise adjustment of the amount of a viscous solution applied and fine adjustment of the application area of the viscous solution.
Inventors:
HONG SEUNG MIN (KR)
KIM KEON HEE (KR)
KIM KEON HEE (KR)
Application Number:
PCT/KR2017/002875
Publication Date:
September 28, 2017
Filing Date:
March 17, 2017
Export Citation:
Assignee:
PROTEC CO LTD (KR)
International Classes:
B05B7/14; B05B1/00; B05B7/04; B05D1/02; B05D7/24; H01L21/02
Foreign References:
| JP2006200013A | 2006-08-03 | |||
| KR20150024649A | 2015-03-09 | |||
| JP2005305341A | 2005-11-04 | |||
| JP2005305427A | 2005-11-04 | |||
| JP2005262108A | 2005-09-29 |
Attorney, Agent or Firm:
YANG, Dooyol (KR)
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