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Patent Searching and Data


Title:
VOLATILE COPPER(I) COMPLEXES FOR DEPOSITION OF COPPER FILMS BY ATOMIC LAYER DEPOSITION
Document Type and Number:
WIPO Patent Application WO2004094689
Kind Code:
A3
Abstract:
The present invention relates to novel 1,3-diimine copper complexes and the use of 1,3-diimine copper complexes for the deposition of copper on substrates or in or on porous solids in an Atomic Layer Deposition process.

Inventors:
BRADLEY ALEXANDER ZAK (US)
THOMPSON JEFFERY SCOTT (US)
Application Number:
US2004011734W
Publication Date:
January 20, 2005
Filing Date:
April 16, 2004
Export Citation:
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Assignee:
E. I. DU PONT DE NEMOURS AND COMPANY
BRADLEY, ALEXANDER, ZAK
THOMPSON, JEFFERY, SCOTT
International Classes:
C07F1/08; C23C16/18; C23C16/455; C23C16/44; (IPC1-7): C23C16/18; C30B25/02; C30B29/02; C07C249/02; C07C249/16
Domestic Patent References:
WO2003095701A12003-11-20
Foreign References:
DE4202889A11993-08-05
US20010055877A12001-12-27
US6511936B12003-01-28
US6372928B12002-04-16
Other References:
MCGEACHIN S G: "SYNTHESIS AND PROPERTIES OF SOME BETA-DIKETIMINES DERIVED FROM ACETYLACETONE, AND THEIR METAL COMPLEXES" CANADIAN JOURNAL OF CHEMISTRY - JOURNAL CANADIEN DE CHIMIE, XX, XX, vol. 46, no. 11, 1968, pages 1903-1912, XP000961572 ISSN: 0008-4042
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