WAFER ACCOMMODATION CONTAINER

Title:

WAFER ACCOMMODATION CONTAINER

Document Type and Number:

WIPO Patent Application WO/2018/180733

Kind Code:

A1

Abstract:

A wafer accommodation container (1) provided with a container body (10) in which one end has an opening (11) and the other end has a mounting part (12) facing the opening (11) and having wafers stacked and accommodated thereon, a lid body (20) for covering the opening (11), and a retaining mechanism (30) for closely fitting and retaining the container body (10) and the lid body (20) so as to be capable of opening and closing, wherein: the retaining mechanism (30) has, in at least two locations, a locking member (32) that extends from the other end of the container body (10) to the one end and has a locking claw part (31) on one end part, and a locking hole part (33) provided to the lid body (20) and to which the locking claw part (31) is locked; and a guide member (40) is configured to be provided to a lid-body-side wall part (21), the guide member (40) guiding the container body (10) and the lid body (20) so as to retain the same in a concentric state while in contact with the locking member (32) when the lid body (20) is being closely fitted to the container body (10).

Inventors:

NISHIJIMA MASAYUKI (JP)
HIROSE KENICHI (JP)

Application Number:

PCT/JP2018/010906

Publication Date:

October 04, 2018

Filing Date:

March 19, 2018

Export Citation:

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Assignee:

ACHILLES CORP (JP)

International Classes:

H01L21/673

Foreign References:

JP2006527921A	2006-12-07
JP2017037893A	2017-02-16
JP2011500462A	2011-01-06
JP2004262545A	2004-09-24
JP2017069918A	2017-04-06

Other References: