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Title:
WAFER CENTERING DEVICE FOR MEASUREMENT APPARATUS
Document Type and Number:
WIPO Patent Application WO/2017/043809
Kind Code:
A1
Abstract:
The present invention provides a wafer centering device for a measurement apparatus, the device comprising: a body unit; a guide unit which is installed in the body unit, has a support part for supporting a wafer, and has a through-hole and; and a displacement unit which is formed to be moved in the through-hole and has a pusher for moving the wafer on the support part.

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Inventors:
LEE GYU-SEONG (KR)
JUNG HYE-SUK (KR)
KWON YOUNG-JONG (KR)
Application Number:
PCT/KR2016/009799
Publication Date:
March 16, 2017
Filing Date:
September 01, 2016
Export Citation:
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Assignee:
COMET CO LTD (KR)
International Classes:
H01L21/66; H01L21/02; H01L21/304; H01L21/306; H01L21/68; H01L21/683
Foreign References:
KR20070069428A2007-07-03
KR19990037484U1999-10-05
KR20100047557A2010-05-10
KR20110053197A2011-05-19
KR100554361B12006-02-24
Attorney, Agent or Firm:
JEON, Soo-Jin (KR)
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