Title:
WAFER HANDLING ROBOT HAVING X-Y STAGE FOR WAFER HANDLING AND POSITIONING
Document Type and Number:
WIPO Patent Application WO2000058188
Kind Code:
B1
Abstract:
An apparatus for handling and positioning wafers (34) or other flat objects. The apparatus has an XY stage (24) with an X-drive (26) and a Y-drive (28), and a bed (30) attached to the XY stage. A chuck (37) is disposed on the bed and an effector (38) is attached to the bed. The effector can rotate about an axis of rotation extending in the Z-direction. The effector can pick up objects and place the objects onto the chuck. The effector can also pick up objects from the chuck. Preferably, the chuck has a recessed region (50) for accommodating the effector so that the effector can be inserted under a flat object on the chuck. The X-drive or the Y-drive of the XY stage provides linear motion for the effector so that the effector can pull wafers from a cassette (32) such as used in the semiconductor industry.
Inventors:
BUERMANN DALE H
Application Number:
PCT/US2000/006661
Publication Date:
January 11, 2001
Filing Date:
March 14, 2000
Export Citation:
Assignee:
N & K TECHNOLOGY INC (US)
International Classes:
H01L21/677; H01L21/68; (IPC1-7): B65G49/07
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