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Title:
WAFER INSPECTION APPARATUS
Document Type and Number:
WIPO Patent Application WO/2023/054910
Kind Code:
A1
Abstract:
The present invention comprises: a rotation stage on which a wafer to be inspected is mounted and the wafer is aligned; a first stage on which the rotation stage is mounted and which transfers the rotation stage forward or backward; a second stage on which the first stage is mounted and which transfers the first stage in a left direction or a right direction; and an optical module for acquiring three-dimensional information of the wafer placed on the rotation stage.

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Inventors:
BACK SEUNG GYUN (KR)
LEE JAE YEOL (KR)
SHIN HO CHEOL (KR)
Application Number:
PCT/KR2022/012846
Publication Date:
April 06, 2023
Filing Date:
August 29, 2022
Export Citation:
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Assignee:
GOOIL ENG CO LTD (KR)
International Classes:
H01L21/66; G01B11/24; G01N21/88; G01N21/95; H01L21/687
Foreign References:
KR20090033977A2009-04-07
KR20190138200A2019-12-12
KR20210033342A2021-03-26
KR20120046957A2012-05-11
KR20200122872A2020-10-28
Attorney, Agent or Firm:
HAEDAM IP GROUP (KR)
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