Title:
WAFER INSPECTION EQUIPMENT HAVING LASER CLEANING FUNCTION
Document Type and Number:
WIPO Patent Application WO/2016/104942
Kind Code:
A1
Abstract:
Disclosed is a wafer inspection equipment for inspecting a semiconductor wafer. The wafer inspection equipment comprises: a main body which defines a chamber on the inside thereof, a probe card being disposed at the top of the chamber; a chuck which fastens a wafer within the chamber; a moving unit which moves the chuck within the chamber and selectively brings the probe card into contact with the wafer; and a laser cleaning device which cleans the probe card within the chamber using a laser beam only if the probe card does not come into contact with the wafer.
Inventors:
LEE JONG MYOUNG (KR)
LEE KYU PIL (KR)
JO SEONG HO (KR)
LEE KYU PIL (KR)
JO SEONG HO (KR)
Application Number:
PCT/KR2015/011968
Publication Date:
June 30, 2016
Filing Date:
November 09, 2015
Export Citation:
Assignee:
IMT CO LTD (KR)
International Classes:
H01L21/66; G01R1/073; H01L21/02; H01L21/268; H01L21/67; H01L21/677; H01L21/683; H01L21/687
Foreign References:
| KR20070024796A | 2007-03-08 | |||
| KR20060126267A | 2006-12-07 | |||
| KR20020001701A | 2002-01-09 | |||
| KR100706814B1 | 2007-04-12 | |||
| KR20100024062A | 2010-03-05 |
Attorney, Agent or Firm:
RYU, CHANG YEOL (KR)
유창열 (KR)
유창열 (KR)
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