Title:
WAFER-LEVEL MAGNETIC SENSOR AND ELECTRONIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2020/258349
Kind Code:
A1
Abstract:
A wafer-level magnetic sensor and an electronic device, comprising a bearing part (1) and at least one first magnetic resistor (3) and at least one second magnetic resistor (4) which are provided on the bearing part (1), wherein a resistance value of the second magnetic resistor (4) is configured to change under the induction of a working magnetic field. A metal wire (6) is also provided above the first magnetic resistor (3); the metal wire (6) is configured to allow a current to be introduced to generate a compensation magnetic field acting on the first magnetic resistor (3); the first magnetic resistor (3) is positioned in detection saturation regions of the compensation magnetic field and the working magnetic field. Such structure is simple in production process and low in costs, and can also realize batch production in the wafer-level manufacturing.
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Inventors:
ZOU QUANBO (CN)
Application Number:
PCT/CN2019/094132
Publication Date:
December 30, 2020
Filing Date:
July 01, 2019
Export Citation:
Assignee:
WEIFANG GOERTEK MICROELECTRONICS CO LTD (CN)
International Classes:
G01C21/08; H01L27/22
Foreign References:
| CN104698409A | 2015-06-10 | |||
| CN208026788U | 2018-10-30 | |||
| CN104422908A | 2015-03-18 | |||
| CN108303660A | 2018-07-20 | |||
| CN104900803A | 2015-09-09 | |||
| US20150022197A1 | 2015-01-22 |
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