Title:
WAFER POLISHING METHOD
Document Type and Number:
WIPO Patent Application WO/2011/068236
Kind Code:
A1
Abstract:
Disclosed is a wafer polishing method, whereby noise generated by a carrier is suppressed, and furthermore, variance of the thickness of a polished wafer is reduced. A polishing liquid is supplied to the surfaces (30a) of a pair of polishing pads (30) positioned above and below the carrier (10), which has a round hole (11) that holds the wafer (20), and which is thinner than the wafer (20), and the polishing pads (30) are relatively slid with respect to the carrier(10), thereby polishing at the same time the both surfaces of the wafer (20) held by the carrier (10). The thickness of the wafer (20) is obtained by detecting information which the carrier (10) issues when the difference between the thickness of the carrier (10) and that of the wafer (20) reaches a predetermined value, and the polishing is terminated.
Inventors:
OGATA, Shinichi (2-1 Shibaura 1-chome, Minato-k, Tokyo 34, 〒1058634, JP)
緒方 晋一 (〒34 東京都港区芝浦一丁目２番１号 株式会社ＳＵＭＣＯ内 Tokyo, 〒1058634, JP)
MIKURIYA, Shunsuke (2-1 Shibaura 1-chome, Minato-k, Tokyo 34, 〒1058634, JP)
御厨 俊介 (〒34 東京都港区芝浦一丁目２番１号 株式会社ＳＵＭＣＯ内 Tokyo, 〒1058634, JP)
TAKAISHI, Kazushige (2-1 Shibaura 1-chome, Minato-k, Tokyo 34, 〒1058634, JP)
緒方 晋一 (〒34 東京都港区芝浦一丁目２番１号 株式会社ＳＵＭＣＯ内 Tokyo, 〒1058634, JP)
MIKURIYA, Shunsuke (2-1 Shibaura 1-chome, Minato-k, Tokyo 34, 〒1058634, JP)
御厨 俊介 (〒34 東京都港区芝浦一丁目２番１号 株式会社ＳＵＭＣＯ内 Tokyo, 〒1058634, JP)
TAKAISHI, Kazushige (2-1 Shibaura 1-chome, Minato-k, Tokyo 34, 〒1058634, JP)
Application Number:
JP2010/071777
Publication Date:
June 09, 2011
Filing Date:
November 30, 2010
Export Citation:
Assignee:
SUMCO CORPORATION (2-1 Shibaura 1-chome, Minato-ku Tokyo, 34, 〒1058634, JP)
株式会社ＳＵＭＣＯ (〒34 東京都港区芝浦一丁目２番１号 Tokyo, 〒1058634, JP)
OGATA, Shinichi (2-1 Shibaura 1-chome, Minato-k, Tokyo 34, 〒1058634, JP)
緒方 晋一 (〒34 東京都港区芝浦一丁目２番１号 株式会社ＳＵＭＣＯ内 Tokyo, 〒1058634, JP)
MIKURIYA, Shunsuke (2-1 Shibaura 1-chome, Minato-k, Tokyo 34, 〒1058634, JP)
御厨 俊介 (〒34 東京都港区芝浦一丁目２番１号 株式会社ＳＵＭＣＯ内 Tokyo, 〒1058634, JP)
株式会社ＳＵＭＣＯ (〒34 東京都港区芝浦一丁目２番１号 Tokyo, 〒1058634, JP)
OGATA, Shinichi (2-1 Shibaura 1-chome, Minato-k, Tokyo 34, 〒1058634, JP)
緒方 晋一 (〒34 東京都港区芝浦一丁目２番１号 株式会社ＳＵＭＣＯ内 Tokyo, 〒1058634, JP)
MIKURIYA, Shunsuke (2-1 Shibaura 1-chome, Minato-k, Tokyo 34, 〒1058634, JP)
御厨 俊介 (〒34 東京都港区芝浦一丁目２番１号 株式会社ＳＵＭＣＯ内 Tokyo, 〒1058634, JP)
International Classes:
H01L21/304; B24B37/04
Attorney, Agent or Firm:
SUGIMURA, Kenji (36F Kasumigaseki Common Gate West, 3-2-1 Kasumigaseki, Chiyoda-k, Tokyo 13, 〒1000013, JP)
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