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Patent Searching and Data


Title:
WAFER STATIC ELIMINATING DEVICE HAVING SORTING FUNCTION
Document Type and Number:
WIPO Patent Application WO/2023/045131
Kind Code:
A1
Abstract:
Disclosed in the present application is a wafer static eliminating device having a sorting function, which comprises a frame. A discharging mechanism is disposed on the inner wall of one side of the frame, and the discharging mechanism comprises supporting frames, supporting sliding rails, first motors, first lead screws, height-adjustable blocks and a wafer box. There are two supporting frames connected on the inner wall of the frame. The tops of the supporting frames are connected to the supporting sliding rails. The first lead screws are provided in the supporting sliding rails. The height-adjustable blocks are fitted over the first lead screws. The wafer box is connected between the height-adjustable blocks. According to the present invention, a material pushing mechanism is arranged and is driven by a driving mechanism to circularly perform a material pushing operation, so as to implement automatic feeding, a wafer is conveyed into a static eliminating mechanism by a material receiving mechanism for undergoing automatic static elimination, then a sorting mechanism detects whether the wafer is qualified, and an unqualified wafer undergoes static elimination again, without manual operations, so that labor is greatly saved and the efficiency is improved.

Inventors:
QIAN CHENG (CN)
LI GANG (CN)
WU QING (CN)
Application Number:
PCT/CN2021/139136
Publication Date:
March 30, 2023
Filing Date:
December 17, 2021
Export Citation:
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Assignee:
JIANGSU ASIA ELECTRONICS TECH CO LTD (CN)
International Classes:
H01L21/67; H01L21/66; H01L21/677; H05F3/04
Foreign References:
CN114023668A2022-02-08
CN212421825U2021-01-29
CN112235927A2021-01-15
CN213278047U2021-05-25
CN108174502A2018-06-15
CN212580906U2021-02-23
CN201454870U2010-05-12
JP2011171591A2011-09-01
Attorney, Agent or Firm:
RUNWEN PATENT LAW FIRM (CN)
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