Title:
WAFER STOCKER
Document Type and Number:
WIPO Patent Application WO/2020/111013
Kind Code:
A1
Abstract:
Provided is a wafer stocker that can further improve the atmosphere around a wafer. A wafer stocker X includes a housing 1, a loading device 2 provided on a front surface of the housing 1, a wafer cassette shelf 3 provided in the housing 1, a wafer transfer robot 4 for transferring wafers into and out of a wafer cassette C on the wafer cassette shelf 3 from a transfer container mounted on the loading device 2, a wafer cassette transfer device 5 for moving the wafer cassette C on the wafer cassette shelf 3 to different heights, and a fan filter unit 8 for generating a laminar flow in a wafer transfer space and a wafer cassette transfer space.
Inventors:
TANIYAMA YASUSHI (JP)
KAWAI TOSHIHIRO (JP)
KAWAI TOSHIHIRO (JP)
Application Number:
PCT/JP2019/046033
Publication Date:
June 04, 2020
Filing Date:
November 25, 2019
Export Citation:
Assignee:
SINFONIA TECHNOLOGY CO LTD (JP)
International Classes:
H01L21/673
Domestic Patent References:
| WO2017038269A1 | 2017-03-09 |
Foreign References:
| JP2011241020A | 2011-12-01 | |||
| JP2000124301A | 2000-04-28 | |||
| JP2006256794A | 2006-09-28 |
Attorney, Agent or Firm:
KAJI, SUHARA & ASSOCIATES (JP)
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