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Title:
WAFER SUPPORT COMPRISING ROTATING SHAFT
Document Type and Number:
WIPO Patent Application WO/2018/124600
Kind Code:
A3
Abstract:
The present invention relates to a rotating shaft of a wafer support. The wafer support according to an embodiment of the present invention comprises: a wafer plate on which a wafer is placed; a rotating shaft for rotating the wafer plate; a cylindrical guide disposed at an outer side of a side surface of the rotating shaft; and a ball bearing between the cylindrical guide and the rotating shaft for supporting the rotating shaft.

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Inventors:
KEUM YEON WOOK (KR)
KIM CHEOL SOO (KR)
Application Number:
PCT/KR2017/015085
Publication Date:
August 23, 2018
Filing Date:
December 20, 2017
Export Citation:
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Assignee:
SK SILTRON CO LTD (KR)
International Classes:
H01L21/687; H01L21/683
Foreign References:
JP2001012615A2001-01-16
KR20110038484A2011-04-14
JP2004247489A2004-09-02
KR100597495B12006-07-10
JP2013183140A2013-09-12
Attorney, Agent or Firm:
LEE, Seung Chan (KR)
Download PDF:
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