Title:
WAFER TRANSFER DEVICE AND METHOD FOR JUDGING ABNORMALITIES OF WAFER TRANSFER DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/191448
Kind Code:
A1
Abstract:
The present invention relates to a wafer transfer device that detects abnormalities of a plurality of end-effectors and a method for judging abnormalities of a wafer transfer device. The wafer transfer device comprises: a plurality of end-effects which extend in a first direction and are arranged in multiple stages in a second direction crossing the first direction, and which respectively support wafers; a spacing adjustment unit for adjusting a spacing between the plurality of end-effectors; and an abnormality detection unit for detecting abnormalities of the plurality of end-effectors, wherein the plurality of end-effectors may include a reference end-effector fixed in position and a variable end-effector of which the distance from the reference end-effector is adjusted on the basis of the reference end-effector.
Inventors:
HYON JUN JIN (KR)
SONG BYOUNG GYU (KR)
MIN JUNG KI (KR)
KO HYEONG SIK (KR)
BAE HYEONG HWAN (KR)
SONG BYOUNG GYU (KR)
MIN JUNG KI (KR)
KO HYEONG SIK (KR)
BAE HYEONG HWAN (KR)
Application Number:
PCT/KR2023/004109
Publication Date:
October 05, 2023
Filing Date:
March 28, 2023
Export Citation:
Assignee:
EUGENE TECHNOLOGY CO LTD (KR)
International Classes:
H01L21/677; B25J15/00; B25J19/02; B25J19/06; H01L21/67
Foreign References:
| KR20080086838A | 2008-09-26 | |||
| KR20050030025A | 2005-03-29 | |||
| JP2018113329A | 2018-07-19 | |||
| KR102020533B1 | 2019-09-10 | |||
| KR20210068706A | 2021-06-10 |
Attorney, Agent or Firm:
AHN, Joon-Hyung et al. (KR)
Download PDF:
Previous Patent: DISPLAY DEVICE
Next Patent: NOVEL PRECURSOR PARTICLE AND CATHODE ACTIVE MATERIAL MANUFACTURED FROM SAME
Next Patent: NOVEL PRECURSOR PARTICLE AND CATHODE ACTIVE MATERIAL MANUFACTURED FROM SAME