Title:
WAFER TRANSFER DEVICE
Document Type and Number:
WIPO Patent Application WO/2016/117777
Kind Code:
A1
Abstract:
An embodiment comprises: a guide moving in the vertical direction or the horizontal direction; a transfer arm provided on the guide and loading spaced apart wafers; a laser emission unit disposed on the guide and emitting first laser beams at the spaced apart wafers loaded on the transfer arm; and a laser detection unit disposed below the transfer arm and collecting, from among the first laser beams, second laser beams having passed through gaps between the spaced apart wafers.
Inventors:
KIM SO MI (KR)
Application Number:
PCT/KR2015/006131
Publication Date:
July 28, 2016
Filing Date:
June 17, 2015
Export Citation:
Assignee:
LG SILTRON INC (KR)
International Classes:
H01L21/677; H01L21/268; H01L21/66
Foreign References:
| US6671059B2 | 2003-12-30 | |||
| JPH06267919A | 1994-09-22 | |||
| KR20080054859A | 2008-06-19 | |||
| US6331890B1 | 2001-12-18 | |||
| KR101469000B1 | 2014-12-04 |
Attorney, Agent or Firm:
PARK, Young Bok et al. (KR)
박영복 (KR)
박영복 (KR)
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