Title:
WAFER TRANSPORT DEVICE
Document Type and Number:
WIPO Patent Application WO1999020552
Kind Code:
A8
Abstract:
The position of a wafer (15) to be drawn out from among a plurality of wafers (15) held at their circumferential portions in the slots (14) of the wafer cassette (13) and the positions of the wafers directly above and below the wafer to be drawn out are measured by the first sensor (16) and the second sensor (17). Based on the measurement information, the calculation section calculates the amount to deflection of the wafers (15) and, according to the result of this calculation, determines whether or not the transfer arm (18) can be inserted under the wafer (15) to be drawn out without contacting the lower wafer (15) and whether or not the wafer (15) to be drawn out can be lifted by the transfer arm (18) without contacting the upper wafer (15).
Inventors:
KATO TOMOO (JP)
KIMURA KEIJI (JP)
KIMURA KEIJI (JP)
Application Number:
PCT/JP1998/004617
Publication Date:
July 01, 1999
Filing Date:
October 13, 1998
Export Citation:
Assignee:
OLYMPUS OPTICAL CO (JP)
KATO TOMOO (JP)
KIMURA KEIJI (JP)
KATO TOMOO (JP)
KIMURA KEIJI (JP)
International Classes:
B65G49/07; H01L21/00; H01L21/677; (IPC1-7): B65G49/07; B65G1/00; H01L21/68
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