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Title:
WASHING DEVICE
Document Type and Number:
WIPO Patent Application WO/2016/017700
Kind Code:
A1
Abstract:
The problem to be addressed by the present invention is to provide a washing device by which it is possible to attain a washing liquid that has a high degree of cleanliness. A washing device 10 is provided with the following: a dissolution tank 20 for dissolving a gas in a liquid; a transfer pump 30 for sending the gas and the liquid into the dissolution tank 20; and a feed nozzle 40 for feeding the liquid stored inside the dissolution tank 20 to a target object W. The transfer pump 30 is a positive displacement pump. Portions of the dissolution tank 20, the transfer pump 30, and the feed nozzle 40 that come into contact with the liquid are made of a fluorine resin.

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Inventors:
TAKAHASHI TSUNEJIRO (JP)
YAMAGUCHI HIDEKI (JP)
KUDAKA SHOGORO (JP)
Application Number:
PCT/JP2015/071519
Publication Date:
February 04, 2016
Filing Date:
July 29, 2015
Export Citation:
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Assignee:
OPT CREATION INC (JP)
SHIGENKAIHATSUKENKYUJYO INC (JP)
International Classes:
H01L21/304; B01F25/60; B08B3/10
Foreign References:
JP2013166143A2013-08-29
JP2012236151A2012-12-06
JP2012000578A2012-01-05
JP2000317811A2000-11-21
JP2010029770A2010-02-12
Attorney, Agent or Firm:
TSUKUNI & ASSOCIATES et al. (JP)
Patent business corporation Tsukuni (JP)
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