Title:
WASHING PIPE FOR TREATMENT OF TAIL GAS FROM EPITAXIAL FURNACE
Document Type and Number:
WIPO Patent Application WO/2021/184682
Kind Code:
A1
Abstract:
A washing pipe for treatment of tail gas from an epitaxial furnace, comprising a washing segment (2). The washing segment (2) is provided with one or more washing inlets (3); a washing mechanism delivers, from the washing inlet (3) to the washing segment (2), a first water flow used for washing; the washing segment (2) is further provided with one or more flushing inlets (4); a flushing mechanism delivers, from the flushing inlet (4) to the washing segment (2), a second water flow used for flushing sediments in the washing pipe.
Inventors:
ZHANG YU (CN)
ZHANG WEN (CN)
ZHANG WEN (CN)
Application Number:
PCT/CN2020/111362
Publication Date:
September 23, 2021
Filing Date:
August 26, 2020
Export Citation:
Assignee:
WAFER WORKS EPITAXIAL CORP (CN)
International Classes:
B01D53/78; B01D47/00; B01D53/18
Foreign References:
| CN201073588Y | 2008-06-18 | |||
| CN101333679A | 2008-12-31 | |||
| CN207266815U | 2018-04-24 | |||
| CN207532981U | 2018-06-26 | |||
| CN109224907A | 2019-01-18 | |||
| CN209271069U | 2019-08-20 | |||
| JPH02144116A | 1990-06-01 | |||
| US20180078895A1 | 2018-03-22 |
Attorney, Agent or Firm:
SHANGHAI PATENT & TRADEMARK LAW OFFICE, LLC (CN)
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