Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
WATER COOLING TYPE SURFACE-WAVE PLASMA GENERATION APPARATUS
Document Type and Number:
WIPO Patent Application WO/2018/026129
Kind Code:
A1
Abstract:
A water cooling type surface-wave plasma generation apparatus is disclosed. The water cooling type surface-wave plasma generation apparatus comprises: a waveguide for transmitting an electromagnetic wave; a dielectric pipe having a first end electromagnetically coupled to the waveguide so as to enable inflow of the electromagnetic wave transmitted inside the waveguide; a cooling jacket, which has a hollow pipe shape, encompasses all or a part of a length of a part of the dielectric pipe exposed to the outside of the waveguide such that an inner surface of the pipe comes into contact with an outer surface of the dielectric pipe, moves a cooling fluid, injected from the outside of the pipe, along the longitudinal direction and circumferential direction of the pipe, and includes a first cooling flow path located between the inner surface and the outer surface of the pipe; and a discharging gas injection unit connected to the dielectric pipe so as to enable a fluid to flow therebetween, and injecting a discharging gas into the dielectric pipe.

Inventors:
YOU, Hyun Jong (306dong 1003ho, 159 Doum 3-ro, Sejong, 30064, KR)
CHOO, Won Il (106dong 202ho, 71 Gyesan-ro,Gunsan-si, Jeollabuk-do, 54105, KR)
Application Number:
KR2017/007905
Publication Date:
February 08, 2018
Filing Date:
July 21, 2017
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
KOREA BASIC SCIENCE INSTITUTE (169-148, Gwahak-roYuseong-gu, Daejeon, 34133, KR)
International Classes:
H01J37/32
Attorney, Agent or Firm:
NAM, Gun Pil et al. (2dong 508ho, ACE hitech city 775, Gyeongin-ro,Yeongdeungpo-gu, Seoul, 07299, KR)
Download PDF: