Title:
WATER-IMMERSED HIGH PRECISION LASER FOCUS SPOT SIZE MEASUREMENT APPARATUS
Document Type and Number:
WIPO Patent Application WO/2020/008306
Kind Code:
A3
Abstract:
A measurement apparatus for measuring a laser focus spot size, which includes a two-dimensional image detector and an imaging system which forms a magnified image of a focus spot located an object plane onto the image detector. The imaging system includes at least an objective lens. A sealed liquid container is secured over a part of the objective lens such as the optical surface of the objective lens is immersed in the liquid (e.g. water) within the container. The liquid container has a window through which the laser beam enters. An image processing method is also disclosed which processes the image obtained by the image detector to obtain the focus spot size while implementing an algorithm that corrects for the effect of ambient vibration.
Inventors:
SUN ZHENG (US)
BRAY DANIEL (US)
WITOWSKI ZENON (US)
SLOTTERBACK TIMOTHY (US)
FU HONG (US)
BRAY DANIEL (US)
WITOWSKI ZENON (US)
SLOTTERBACK TIMOTHY (US)
FU HONG (US)
Application Number:
PCT/IB2019/055463
Publication Date:
March 05, 2020
Filing Date:
June 27, 2019
Export Citation:
Assignee:
AMO DEV LLC (US)
International Classes:
A61F9/008
Foreign References:
| US4917489A | 1990-04-17 | |||
| US20170112663A1 | 2017-04-27 |
Attorney, Agent or Firm:
SHIRTZ, Joseph F. et al. (US)
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