WATER-REACTIVE AL COMPOSITE MATERIAL, WATER-REACTIVE AL FILM, PROCESS FOR PRODUCING THE AL FILM, AND CONSTITUENT MEMBER FOR FILM-DEPOSITION CHAMBER

WIPO Patent Application WO/2011/052640

A1

Provided are an Al composite material which is capable of reacting in an atmosphere where water is present and which thus becomes soluble, an Al film comprising the Al composite material, a process for producing the Al film, and a constituent member for film-deposition chamber, the member being covered with the Al film. The water-reactive Al composite material is obtained by adding 2.0-5.0 wt.% In and 0.05-1.0 wt.% metal selected from Ti, V, and Zr to Al selected from among 2N Al to 5N Al, the amounts being with respect to the Al. The water-reactive Al film was produced from this material. The constituent member for film-deposition chamber has the Al film on the surface.

JPH01294854	PRODUCTION OF METAL-COATED STEEL EXCELLENT IN CORROSION RESISTANCE AND ORNAMENTAL PROPERTY
JPS6056791	[Title of the Invention] Heat board
JPH10204569	SELF-LUBRICATING COMPOSITE MATERIAL AND COMPOSITE SURFACE TREATMENT METHOD USING THE MATERIAL

KADOWAKI YUTAKA (JP)
SAITOU TOMOKO (JP)
MUSHIAKE KATSUHIKO (JP)

PCT/JP2010/069074

May 05, 2011

October 27, 2010

Click for automatic bibliography generation  

ULVAC INC (JP)
KADOWAKI YUTAKA (JP)
SAITOU TOMOKO (JP)
MUSHIAKE KATSUHIKO (JP)

C23C4/06; C22C21/00; C23C4/08; C23C14/00; C23C16/44

JP2005256063A	2005-09-22
JPH1112727A	1999-01-19
JP2002327222A	2002-11-15

KURIHARA, Hiroyuki et al. (JP)
Hiroyuki Kurihara (JP)

View/Download PDF      PDF Help

Previous Patent: LED LIGHTING DEVICE

Next Patent: CONDUCTOR PATTERN FORMING METHOD AND CONDUCTOR PATTERN