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Title:
WATER-SOLUBLE WORKING FLUID FOR FIXED ABRASIVE GRAIN WIRE SAW
Document Type and Number:
WIPO Patent Application WO/2012/115099
Kind Code:
A1
Abstract:
Provided is a water-soluble working fluid for a fixed abrasive grain wire saw, which can suppress an increase in viscosity when contamination by chips occurs and suppress the occurrence of clogged piping or firm sticking in equipment caused by contamination by chips; the foregoing is achieved by containing (C) a carbonic acid, (D) a compound that is basic when dissolved in water and (E) water, having an electrical conductivity at 25°C of not lower than 300 μS/cm and not higher than 3000 μS/cm, having a pH at 25°C of not lower than 5 and not higher than 10, and having a viscosity of a pseudo-working liquid of less than 30 mPa•s at 25°C, where the pseudo working liquid is formed by adding 10 mass % of silicon grains having an average particle diameter of 1.5 μm and then stirring.

Inventors:
HAMAMOTO SHINJI (JP)
OHASHI YASUMASA (JP)
NUMATA YASUNORI (JP)
ISHIZUKA HIROMICHI (JP)
TAKAHASHI HIROAKI (JP)
Application Number:
PCT/JP2012/054115
Publication Date:
August 30, 2012
Filing Date:
February 21, 2012
Export Citation:
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Assignee:
YUSHIRO CHEM IND (JP)
HAMAMOTO SHINJI (JP)
OHASHI YASUMASA (JP)
NUMATA YASUNORI (JP)
ISHIZUKA HIROMICHI (JP)
TAKAHASHI HIROAKI (JP)
International Classes:
C10M173/02; B24B27/06; B28D5/04; H01L21/304; C10M129/08; C10M129/26; C10M145/26; C10M145/28; C10M145/30; C10N20/00; C10N20/02; C10N30/00; C10N30/12; C10N40/22; C10N40/32
Domestic Patent References:
WO2011007590A12011-01-20
WO2012017947A12012-02-09
Foreign References:
JP2003082335A2003-03-19
JP2003082334A2003-03-19
JP2001054850A2001-02-27
JP2003082334A2003-03-19
Other References:
See also references of EP 2679661A4
Attorney, Agent or Firm:
YAMAMOTO, NORIAKI (JP)
Yamamoto 典輝 (JP)
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Claims: