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Title:
WAVEFRONT MEASUREMENT DEVICE, WAVEFRONT MEASUREMENT METHOD AND MOVING BODY OBSERVATION DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/220640
Kind Code:
A1
Abstract:
This wavefront measurement device (3) has been configured so that a wavefront estimation unit (41) calculates approximate values of wavefronts of luminous fluxes at all apertures from position of respective condensed light spot images detected by a first optical detector (16), a second optical detector (26) and a third optical detector (36), calculates, by using the approximate values, a point image intensity distribution of the condensed spot images respectively detected by the first optical detector (16), the second optical detector (26) and the third optical detector (36), and estimates, from the point image intensity distribution and the condensed light spot images, the wavefronts of the luminous fluxes at the all the apertures.

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Inventors:
ENDO TAKAO (JP)
ANDO TOSHIYUKI (JP)
TAKANEZAWA TAKASHI (JP)
EZAKI YUTAKA (JP)
Application Number:
PCT/JP2018/019367
Publication Date:
November 21, 2019
Filing Date:
May 18, 2018
Export Citation:
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Assignee:
MITSUBISHI ELECTRIC CORP (JP)
International Classes:
G01J9/00; B64G3/00
Foreign References:
JP2005331440A2005-12-02
JP2015055544A2015-03-23
JP2015523105A2015-08-13
JPH0915057A1997-01-17
JP2011247687A2011-12-08
US20070216867A12007-09-20
Attorney, Agent or Firm:
TAZAWA, Hideaki et al. (JP)
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