Title:
WAVEGUIDE-COUPLED MSM-TYPE PHOTODIODE
Document Type and Number:
WIPO Patent Application WO/2013/146406
Kind Code:
A1
Abstract:
A waveguide-coupled MSM-type photodiode of the present invention comprises a structure in which a semiconductor light-absorbing layer and an optical waveguide core layer are adjacent and optically coupled to each other, has formed metal-semiconductor-metal (MSM) junctions which are arranged at an interval on the semiconductor light-absorbing layer, and is characterized in that of the MSM electrodes arranged at the interval, a voltage is set so that a reverse bias is applied to those MSM electrodes that are arranged on a light incidence side.
Inventors:
FUJIKATA JUNICHI (JP)
NAKAMURA TAKAHIRO (JP)
NAKAMURA TAKAHIRO (JP)
Application Number:
PCT/JP2013/057622
Publication Date:
October 03, 2013
Filing Date:
March 18, 2013
Export Citation:
Assignee:
NEC CORP (JP)
FUJIKATA JUNICHI (JP)
NAKAMURA TAKAHIRO (JP)
FUJIKATA JUNICHI (JP)
NAKAMURA TAKAHIRO (JP)
International Classes:
H01L31/108; G02B6/42
Domestic Patent References:
| WO1996005536A2 | 1996-02-22 | |||
| WO2008072688A1 | 2008-06-19 |
Foreign References:
| JPS63160373A | 1988-07-04 | |||
| JPH04328876A | 1992-11-17 | |||
| US20060205127A1 | 2006-09-14 |
Other References:
E.H.BBTTCHER: "Millimeter wave distributed metal - semiconductor - metal photodetectors", APPLIED PHYSICS LETTERS, vol. 66, no. 26, 1995, pages 3648 - 3650
Attorney, Agent or Firm:
TANAI Sumio et al. (JP)
Sumio Tanai (JP)
Sumio Tanai (JP)
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