Title:
WAVEGUIDE
Document Type and Number:
WIPO Patent Application WO/2023/140090
Kind Code:
A1
Abstract:
This waveguide comprises: three or more conductor layers that are stacked; two or more dielectric layers that are stacked, each being formed between two conductor layers adjacent to each other among the three or more conductor layers; and a first via group and a second via group each including one or more vias disposed in at least one dielectric layer among the two or more dielectric layers. The first via group and the second via group are arrayed in parallel. Among the vias included in the first via group and the second via group, the vias disposed in at least one of the two or more dielectric layers differ in position on the plane of the dielectric layer from the vias disposed in the remaining dielectric layer.
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Inventors:
MORISHITA YOHEI
TAKAHASHI KEN
MURATA TOMOHIRO
SANGAWA USHIO
TAKINAMI KOJI
TAKAHASHI KEN
MURATA TOMOHIRO
SANGAWA USHIO
TAKINAMI KOJI
Application Number:
PCT/JP2022/048553
Publication Date:
July 27, 2023
Filing Date:
December 28, 2022
Export Citation:
Assignee:
PANASONIC IP MAN CO LTD (JP)
International Classes:
H01P3/12; H01L21/3205; H01L21/768; H01L23/522; H01P11/00
Foreign References:
| JPH03165058A | 1991-07-17 | |||
| JP2013520797A | 2013-06-06 | |||
| JP2017079297A | 2017-04-27 | |||
| JP2008271295A | 2008-11-06 |
Attorney, Agent or Firm:
WASHIDA & ASSOCIATES (JP)
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