Title:
WAVELENGTH CONVERSION-TYPE SPATIAL LIGHT MODULATION DEVICE
Document Type and Number:
WIPO Patent Application WO/2014/045865
Kind Code:
A1
Abstract:
In the present invention, the following are provided: a spatial light modulation section (10) having a phase modulation surface (10a) that receives input of laser light (L1) of a wavelength region that is longer than the ultraviolet region, modulates the phase of the laser light (L1) in a plurality of regions which are arrayed two-dimensionally, and generates modulated laser light (L2); a wavelength conversion section (20) that has a light incidence surface that receives the modulated laser light (L2) output from the spatial light modulation section (10) and that converts the wavelength of the modulated laser light (L2) to the wavelength of the ultraviolet region; and an image transfer optical system (30) that combines the phase modulation surface of the spatial light modulation section (10) and the light incidence surface of the wavelength conversion section (20) so that the same become a mutually and optically coupled system. This configuration achieves a wavelength conversion-type spatial light modulation device that can output spatially phase-modulated ultraviolet laser light and reduce impact on the spatial light modulation section.
Inventors:
SAITO HIROSHI (JP)
FUJIMOTO MASATOSHI (JP)
OISHI SHINGO (JP)
FUKUMITSU KENSHI (JP)
FUJIMOTO MASATOSHI (JP)
OISHI SHINGO (JP)
FUKUMITSU KENSHI (JP)
Application Number:
PCT/JP2013/073670
Publication Date:
March 27, 2014
Filing Date:
September 03, 2013
Export Citation:
Assignee:
HAMAMATSU PHOTONICS KK (JP)
International Classes:
G02F1/37; G02F1/061; G02F1/13
Foreign References:
| JP2009294509A | 2009-12-17 |
Other References:
M. HACKER ET AL.: "Micromirror SLM for femtosecond pulse shaping in the ultraviolet", APPLIED PHYSICS B, vol. 76, 2 June 2003 (2003-06-02), pages 711 - 714, XP008035863
K. HAZU ET AL.: "Spatial light modulator with an over-two-octave bandwidth from ultraviolet to near infrared", OPTICS LETTERS, vol. 32, no. 22, 15 November 2007 (2007-11-15), pages 3318 - 3320, XP001509392
P. NUERNBERGER ET AL.: "Generation of shaped ultraviolet pulses at the third harmonic of titanium-sapphire femtosecond laser radiation", APPLIED PHYSICS B, vol. 88, no. 4, 14 July 2007 (2007-07-14), pages 519 - 526, XP019540576
T. TANIGAWA ET AL.: "Spatial light modulator of 648 pixels with liquid crystal transparent from ultraviolet to near-infrared and its chirp compensation application", OPTICS LETTERS, vol. 34, no. 11, 1 June 2009 (2009-06-01), pages 1696 - 1698, XP001524493
See also references of EP 2899591A4
M. HACKER ET AL.: "Micromirror SLM for femtosecond pulse shaping in the ultraviolet", APPLIED PHYSICS B, vol. 76, 2003, pages 711 - 714, XP008035863
T. TANIGAWA ET AL.: "Spatial light modulator of 648 pixels with liquid crystal transparent from ultraviolet to near-infrared and its chirp compensation application", OPTICS LETTERS, vol. 34, no. 11, 2009, pages 1696 - 1698, XP001524493
K. HAZU ET AL.: "Special light modulator with an over-two-octave bandwidth from ultraviolet to near infrared", OPTICS LETTERS, vol. 32, 2007, pages 3318 - 3320, XP002755611
A. HOLLE ET AL.: "Optimizing UV laser focus profiles for improved MALDI performance", JOURNAL OF MASS SPECTROMETRY, vol. 41, 2006, pages 705 - 716
P. NUERNBERGER ET AL.: "Generation of shaped ultraviolet pulses at the third harmonic of titanium-sapphire femtosecond laser radiation", APPLIED PHYSICS B, vol. 88, 2007, pages 519 - 526, XP019540576, DOI: doi:10.1007/s00340-007-2725-4
K. HAZU ET AL.: "Spatial light modulator with an over-two-octave bandwidth from ultraviolet to near infrared", OPTICS LETTERS, vol. 32, no. 22, 15 November 2007 (2007-11-15), pages 3318 - 3320, XP001509392
P. NUERNBERGER ET AL.: "Generation of shaped ultraviolet pulses at the third harmonic of titanium-sapphire femtosecond laser radiation", APPLIED PHYSICS B, vol. 88, no. 4, 14 July 2007 (2007-07-14), pages 519 - 526, XP019540576
T. TANIGAWA ET AL.: "Spatial light modulator of 648 pixels with liquid crystal transparent from ultraviolet to near-infrared and its chirp compensation application", OPTICS LETTERS, vol. 34, no. 11, 1 June 2009 (2009-06-01), pages 1696 - 1698, XP001524493
See also references of EP 2899591A4
M. HACKER ET AL.: "Micromirror SLM for femtosecond pulse shaping in the ultraviolet", APPLIED PHYSICS B, vol. 76, 2003, pages 711 - 714, XP008035863
T. TANIGAWA ET AL.: "Spatial light modulator of 648 pixels with liquid crystal transparent from ultraviolet to near-infrared and its chirp compensation application", OPTICS LETTERS, vol. 34, no. 11, 2009, pages 1696 - 1698, XP001524493
K. HAZU ET AL.: "Special light modulator with an over-two-octave bandwidth from ultraviolet to near infrared", OPTICS LETTERS, vol. 32, 2007, pages 3318 - 3320, XP002755611
A. HOLLE ET AL.: "Optimizing UV laser focus profiles for improved MALDI performance", JOURNAL OF MASS SPECTROMETRY, vol. 41, 2006, pages 705 - 716
P. NUERNBERGER ET AL.: "Generation of shaped ultraviolet pulses at the third harmonic of titanium-sapphire femtosecond laser radiation", APPLIED PHYSICS B, vol. 88, 2007, pages 519 - 526, XP019540576, DOI: doi:10.1007/s00340-007-2725-4
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
Yoshiki Hasegawa (JP)
Yoshiki Hasegawa (JP)
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