WAVELENGTH-DEPENDENT SURFACE CONTOUR MEASUREMENT SYSTEM AND METHOD

WIPO Patent Application WO1999058929

A3

An optical metrology system for measuring a contour of a workpiece surface. The system includes a multi-wavelength light projector that projects a wavelength-varying collimated light beam onto the surface of the workpiece. The collimated light beam has a plurality of substantially parallel light rays, each of which has a predetermined wavelength. The wavelength of the plurality of light rays varies in a predetermined manner across a width of the collimated light beam. A wavelength-discriminating detector determines an intensity of light reflected from the workpiece surface and detects wavelength-specific characteristics of the received reflected light. Significantly, the wavelength-specific characteristics of the reflected light are related to the distance of the workpiece surface from the detector.

WO/1999/045370	METHOD AND SYSTEM FOR RAPID MEASUREMENT OF SMALL OBJECTS ON A SURFACE
JP5360132	Inspection equipment and inspection method for superconducting wires
JPS6287122	APPARATUS FOR FRAGMENTARILY MEASURING SHAPE OF OPTICALLY EFFECTIVE CURVED SURFACE IN NON-CONTACT STATE SURFACE IN NON-CONTACT STATE

BEN-DOV SHIMSHON (IL)
LANZET IGAL (IL)
KUPERMAN IGOR (IL)

PCT/IL1999/000247

February 03, 2000

May 11, 1999

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METROPTIC TECHNOLOGIES LTD (IL)
BEN DOV SHIMSHON (IL)
LANZET IGAL (IL)
KUPERMAN IGOR (IL)

G01B11/24; G01S7/481; G01S17/87; G01S17/89; (IPC1-7): G01B11/24; G01S17/89; G02B6/42; G01J3/28

US5675407A	1997-10-07
FR2748322A1	1997-11-07
US4687325A	1987-08-18

PATENT ABSTRACTS OF JAPAN vol. 098, no. 011 30 September 1998 (1998-09-30)

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