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Title:
WAVELENGTH-DISPERSIVE X-RAY FLUORESCENCE ANALYSIS DEVICE
Document Type and Number:
WIPO Patent Application WO/2018/061607
Kind Code:
A1
Abstract:
A wavelength-dispersive X-ray fluorescence analysis device is provided with a single one-dimensional detector (10) comprising a plurality of detection elements (7) that are arranged linearly. The wavelength-dispersive X-ray fluorescence analysis device is also provided with a detector position change mechanism (11) for setting the position of the one-dimensional detector (10) to either a parallel position in which the arrangement direction of the detection elements (7) becomes parallel to a spectral angle direction in a spectral element (6) or to an intersecting position in which the arrangement direction of the detection elements (7) intersects the spectral angle direction. In the parallel position, a light-receiving surface of the one-dimensional detector (10) is positioned at the focal point of a focused secondary X-ray (42). In the intersecting position, a light-receiving slit (9) is arranged at the focal point of the focused secondary X-ray (42), and the light-receiving surface of the one-dimensional detector (10) is positioned closer than the light-receiving slit (9) to the direction of movement of the focused secondary X-ray (42) that is separated from the spectral element (6).

Inventors:
KATO SHUICHI (JP)
YAMADA TAKASHI (JP)
KATAOKA YOSHIYUKI (JP)
Application Number:
PCT/JP2017/031494
Publication Date:
April 05, 2018
Filing Date:
August 31, 2017
Export Citation:
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Assignee:
RIGAKU DENKI CO LTD (JP)
International Classes:
G01N23/223; G01N23/207
Domestic Patent References:
WO2004086018A12004-10-07
Foreign References:
JP2012058147A2012-03-22
JPS49118493A1974-11-12
JPH05340897A1993-12-24
JP2011520126A2011-07-14
JPH08128975A1996-05-21
JPH08128975A1996-05-21
JP2012159404A2012-08-23
Other References:
See also references of EP 3521813A4
Attorney, Agent or Firm:
SUGIMOTO, Shuji et al. (JP)
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