Title:
WAVELENGTH DISPERSIVE X-RAY FLUORESCENCE SPECTROMETER
Document Type and Number:
WIPO Patent Application WO/2018/061607
Kind Code:
A8
Abstract:
A wavelength dispersive X-ray fluorescence spectrometer is provided with a single one-dimensional detector (10) comprising a plurality of detection elements (7) that are arranged linearly. The wavelength dispersive X-ray fluorescence spectrometer is also provided with a detector position change mechanism (11) for setting the position of the one-dimensional detector (10) to either a parallel position in which the arrangement direction of the detection elements (7) becomes parallel to a spectral angle direction in a spectral element (6) or to an intersecting position in which the arrangement direction of the detection elements (7) intersects the spectral angle direction. In the parallel position, a light-receiving surface of the one-dimensional detector (10) is positioned at the focal point of a focused secondary X-ray (42). In the intersecting position, a light-receiving slit (9) is arranged at the focal point of the focused secondary X-ray (42), and the light-receiving surface of the one-dimensional detector (10) is positioned closer than the light-receiving slit (9) to the direction of movement of the focused secondary X-ray (42) that is separated from the spectral element (6).
Inventors:
KATO SHUICHI (JP)
YAMADA TAKASHI (JP)
KATAOKA YOSHIYUKI (JP)
YAMADA TAKASHI (JP)
KATAOKA YOSHIYUKI (JP)
Application Number:
PCT/JP2017/031494
Publication Date:
April 04, 2019
Filing Date:
August 31, 2017
Export Citation:
Assignee:
RIGAKU DENKI CO LTD (JP)
International Classes:
G01N23/223; G01N23/207
Attorney, Agent or Firm:
SUGIMOTO, Shuji et al. (JP)
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