Title:
WEAR-LESS OPERATION OF A MATERIAL SURFACE WITH A SCANNING PROBE MICROSCOPE
Document Type and Number:
WIPO Patent Application WO/2011/055346
Kind Code:
A3
Abstract:
The invention concerns a method for scanning a surface (52) of a material (50) with a scanning probe microscope or SPM (10), the SPM having a cantilever sensor (100) configured to exhibit distinct spring behaviors (C, Ck), the method comprising: - operating the SPM in contact mode, whereby the sensor is scanned on the material surface and a first spring behavior (C) of the sensor (e.g. a fundamental mode of flexure thereof) is excited by deflection of the sensor by the material surface; and - exciting with excitation means a second spring behavior (Ck) of the sensor at a resonance frequency thereof (e.g. one or more higher-order resonant modes) of the cantilever sensor to modulate an interaction of the sensor and the material surface and thereby reduce the wearing of the material surface.
Inventors:
DUERIG URS T (CH)
GOTSMANN BERND W (CH)
KNOLL ARMIN W (CH)
LANTZ MARK A (CH)
GOTSMANN BERND W (CH)
KNOLL ARMIN W (CH)
LANTZ MARK A (CH)
Application Number:
PCT/IB2010/055062
Publication Date:
March 01, 2012
Filing Date:
November 08, 2010
Export Citation:
Assignee:
IBM (US)
DUERIG URS T (CH)
GOTSMANN BERND W (CH)
KNOLL ARMIN W (CH)
LANTZ MARK A (CH)
DUERIG URS T (CH)
GOTSMANN BERND W (CH)
KNOLL ARMIN W (CH)
LANTZ MARK A (CH)
International Classes:
G01N13/00; G01Q70/08
Domestic Patent References:
| WO2007095360A2 | 2007-08-23 |
Foreign References:
| US20060260388A1 | 2006-11-23 | |||
| EP1995737A1 | 2008-11-26 |
Attorney, Agent or Firm:
RAGOT, Sébastien et al. (IBM Research - ZurichIntellectual Property La, Säumerstrasse 4 Rüschlikon, CH)
Download PDF:
Previous Patent: COLLAPSIBLE BASKET MADE OF METAL WIRE
Next Patent: DEFORMABLE FERROFLUID LAYER DEVICES FOR OPTICAL MODULATION AND MICROMOLDING
Next Patent: DEFORMABLE FERROFLUID LAYER DEVICES FOR OPTICAL MODULATION AND MICROMOLDING