WET CHEMICAL PROCESSING CHAMBERS FOR PROCESSING MICROFEATURE WORKPIECES

Title:

WET CHEMICAL PROCESSING CHAMBERS FOR PROCESSING MICROFEATURE WORKPIECES

Document Type and Number:

WIPO Patent Application WO2005001896

Kind Code:

A3

Abstract:

A wet chemical processing chamber comprising a fixed unit, a detachable unit releasably coupled to the fixed unit, a seal contacting the fixed unit and the detachable unit, and a processing component disposed in the fixed unit and/or the detachable unit. The fixed unit can have a first flow system configured to direct a processing fluid through the fixed unit and a mounting fixture for fixedly attaching the fixed unit to a platform or deck of an integrated processing tool. The detachable unit can include a second flow system configured to direct the processing fluid to and/or from the first flow system of the fixed unit. The seal has an orifice through which processing fluid can flow between the first and second flow systems, and the processing component can impart a property to the processing fluid for processing a surface on a microfeature workpiece having submicron microfeatures.

Inventors:

HANSON KYLE (US)
DOLECHEK KERT L (US)
MCHUGH PAUL R (US)
WILSON GREGORY J (US)
DAVIS JEFFRY ALAN (US)
HARRIS RANDY (US)

Application Number:

PCT/US2004/017657

Publication Date:

April 27, 2006

Filing Date:

June 04, 2004

Export Citation:

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Assignee:

SEMITOOL INC (US)
HANSON KYLE (US)
DOLECHEK KERT L (US)
MCHUGH PAUL R (US)
WILSON GREGORY J (US)
DAVIS JEFFRY ALAN (US)
HARRIS RANDY (US)

International Classes:

B65G49/07; C12N15/31; C25D5/08; C25D7/12; C25D17/00; C25D17/06; F26B5/04; H01L; (IPC1-7): C25D7/12; C25D5/02; C25D21/00; C25D17/00; C25D17/02; C25D17/04

Foreign References:

US6436267B1	2002-08-20
US20010032788A1	2001-10-25
US4890756A	1990-01-02

Other References: