WET-DEVELOPABLE ANTI-REFLECTIVE COMPOSITIONS

Title:

WET-DEVELOPABLE ANTI-REFLECTIVE COMPOSITIONS

Document Type and Number:

WIPO Patent Application WO2004001806

Kind Code:

A3

Abstract:

Anti-reflective compositions and methods of using these compositions to form circuits are provided. The compositions comprise a polymer dissolved or dispersed in a solvent system. In a preferred embodiment, the polymers include a light-attenuating moiety having a structure selected from the group consisting of Formula (I) and (II), where each of X<1> and Y is individually selected from the group consisting of electron withdrawing groups; R<2> is selected from the group consisting of alkyls and aryls; and R<3> is selected from the group consisting of hydrogen and alkyls. The resulting compositions are spin bowl compatible (i.e., they do not crosslink prior to the bake stages of the microlithographic processes or during storage at room temperature), are wet developable, and have superior optical properties.

Inventors:

NEEF CHARLES J
KRISHNAMURTHY VANDANA

Application Number:

PCT/US2003/019906

Publication Date:

September 16, 2004

Filing Date:

June 24, 2003

Export Citation:

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Assignee:

BREWER SCIENCE INC (US)

International Classes:

C08G79/00; C08L85/00; G02B1/11; (IPC1-7): G03C1/492; G03C5/00

Foreign References:

GB2288184A	1995-10-11
US6361833B1	2002-03-26
US6487879B1	2002-12-03

Other References: