Title:
WET-PROCESS FIXTURE LIFTING AND FIXING DEVICE AND METHOD
Document Type and Number:
WIPO Patent Application WO/2020/020070
Kind Code:
A1
Abstract:
A wet-process fixture lifting and fixing device and method. The device comprises a wafer base lifting mechanism (1), a wafer base fixing mechanism (7), and a wet-process fixture lifting mechanism (3). The wafer base lifting mechanism (1) is disposed above an opening of an immersion bath (4). The wafer base fixing mechanism (7) is disposed on the wafer base lifting mechanism (1). The wet-process fixture lifting mechanism (3) is connected to a wet-process fixture (2). In the wet-process fixture lifting and fixing device, the wet-process fixture lifting mechanism (3) collectively lifts all of the wet-process fixtures (2); the wafer base lifting mechanism (1) lifts a wafer base (5) in the wet-process fixture (2); the wafer base fixing mechanism (7) fixes the wafer base (5) in the wet-process fixture (2). The invention is easy to operate, and lifts and fixes multiple wafer bases (5) at the same time, thereby improving productivity, and ensuring precise operation and quality work.
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Inventors:
SHEN BINGBING (CN)
ZOU JINCHENG (CN)
WANG JINGMIAO (CN)
WEI MIN (CN)
SANFORD ERIC (US)
SORABJI KHURSHED (US)
NGUYEN MINH (US)
ZOU JINCHENG (CN)
WANG JINGMIAO (CN)
WEI MIN (CN)
SANFORD ERIC (US)
SORABJI KHURSHED (US)
NGUYEN MINH (US)
Application Number:
PCT/CN2019/096791
Publication Date:
January 30, 2020
Filing Date:
July 19, 2019
Export Citation:
Assignee:
DONGTAI HI TECH EQUIPMENT TECH CO LTD (CN)
ALTA DEVICES INC (US)
ALTA DEVICES INC (US)
International Classes:
H01L21/67; H01L21/66; H01L21/677
Foreign References:
| CN208444811U | 2019-01-29 | |||
| CN102623372A | 2012-08-01 | |||
| CN202474010U | 2012-10-03 | |||
| CN205092224U | 2016-03-16 | |||
| CN203910837U | 2014-10-29 | |||
| JP2008130752A | 2008-06-05 |
Attorney, Agent or Firm:
CN-KNOWHOW INTELLECTUAL PROPERTY AGENT LIMITED (CN)
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