Title:
WIDE-RANGE LOAD SENSOR USING QUARTZ RESONATOR
Document Type and Number:
WIPO Patent Application WO/2017/213059
Kind Code:
A1
Abstract:
Provided is a load sensor that uses a quartz resonator and with which it is possible to increase detection range while maintaining resolution. This load sensor 10 includes: a quartz resonator layer 12 provided with a sheet-form quartz resonator 16 and a pair of electrode units 18 on a pair of surfaces of the quartz resonator 16 opposing each other in the sheet-thickness direction; and at least one holding layer 14 that, when an external load is applied to the quartz resonator layer 12, produces displacement in approximately the same amount as that of the quartz resonator layer 12. Therefore, when an external load is applied in a direction parallel to the sheet shape of the sheet-form quartz resonator 16, deformation of the quartz resonator 16 in a curved direction is suppressed by the holding layer 14, and the quartz resonator 16 is prevented from buckling. Therefore, the thickness of the sheet-form quartz resonator 16 can be further reduced, and the measurement range can be increased.
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Inventors:
ARAI FUMIHITO (JP)
MUROZAKI YUICHI (JP)
SAKUMA SHINYA (JP)
MUROZAKI YUICHI (JP)
SAKUMA SHINYA (JP)
Application Number:
PCT/JP2017/020723
Publication Date:
December 14, 2017
Filing Date:
June 02, 2017
Export Citation:
Assignee:
UNIV NAGOYA NAT UNIV CORP (JP)
International Classes:
G01L1/10; G01G3/13; G01L1/16
Foreign References:
| JP2015025796A | 2015-02-05 | |||
| JP2002365123A | 2002-12-18 | |||
| JP2011058944A | 2011-03-24 | |||
| JPS5640727A | 1981-04-17 | |||
| JPH01109228A | 1989-04-26 | |||
| US20030000317A1 | 2003-01-02 | |||
| JP2015025796A | 2015-02-05 |
Other References:
Z. WANG ET AL.: "A thickness-shear quartzforce sensor with dual-mode temperature and pressure", IEEE SENS. J., vol. 3, no. 4, August 2003 (2003-08-01), pages 490 - 497
K. NARUMI ET AL.: "Miniaturization and resolution improvement of load sensor using AT-cut quartz crystal resonator", PROC. OF IEEE/SICE INTERNATIONAL SYMPOSIUM ON SYSTEM INTEGRATION 2009, January 2009 (2009-01-01), pages 13 - 18, XP031640473
Y. MUROZAKI ET AL.: "Wide range load sensor using Quartz Crystal Resonator for detection of biological signals", SENSORS J., vol. 15, 2015, pages 1913 - 1919, XP011570932, DOI: doi:10.1109/JSEN.2014.2365240
K. NARUMI ET AL.: "Miniaturization and resolution improvement of load sensor using AT-cut quartz crystal resonator", PROC. OF IEEE/SICE INTERNATIONAL SYMPOSIUM ON SYSTEM INTEGRATION 2009, January 2009 (2009-01-01), pages 13 - 18, XP031640473
Y. MUROZAKI ET AL.: "Wide range load sensor using Quartz Crystal Resonator for detection of biological signals", SENSORS J., vol. 15, 2015, pages 1913 - 1919, XP011570932, DOI: doi:10.1109/JSEN.2014.2365240
Attorney, Agent or Firm:
IKEDA Haruyuki et al. (JP)
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