Title:
WIDE-RANGE WIND SPEED SENSOR AND MANUFACTURING METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2019/242347
Kind Code:
A1
Abstract:
The present invention relates to a wide-range wind speed sensor and manufacturing method therefor. The wide-range wind speed sensor comprises a substrate (1), an elastic thin film (2), a heating element (5), a raised table surface (6), a heat insulating layer (7), four pressure sensors (31), and four temperature sensors (41). On the basis of the design scheme of the present invention, the described hardware is combined to construct the wide-range wind speed sensor. Correspondingly, the present invention further relates to the manufacturing method for the wide-range wind speed sensor. Therefore, according to the whole technical solution, wind speed and wind direction data can be accurately measured under a low wind speed by using the principle of a thermal sensor; moreover, by using a piezoresistive effect, the wind speed and wind direction data can be accurately measured under a high wind speed; furthermore, by using a bulk-silicon micromachining technique, the process is reliable, batch manufacturing is easy, and the costs are low; in addition, a two-dimensional symmetrical structure is further used, and temperature drift is small.
Inventors:
QIN MING (CN)
WU QIQIANG (CN)
SONG KUN (CN)
YI ZHENXIANG (CN)
HUANG QINGAN (CN)
WU QIQIANG (CN)
SONG KUN (CN)
YI ZHENXIANG (CN)
HUANG QINGAN (CN)
Application Number:
PCT/CN2019/078738
Publication Date:
December 26, 2019
Filing Date:
March 19, 2019
Export Citation:
Assignee:
UNIV SOUTHEAST (CN)
International Classes:
G01P5/10; G01P5/08; G01P13/02
Foreign References:
| CN109001486A | 2018-12-14 | |||
| CN105675916A | 2016-06-15 | |||
| CN101769936A | 2010-07-07 | |||
| CN104977425A | 2015-10-14 | |||
| JPH08285652A | 1996-11-01 |
Attorney, Agent or Firm:
NANJING RUIHONG PATENT & TRADEMARK AGENCY (ORDINARY PARTNERSHIP) (CN)
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