Title:
WIEN FILTER AND MULTI-ELECTRON BEAM INSPECTION DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/091475
Kind Code:
A1
Abstract:
Provided is a Wien filter in which discharge risk is reduced and which operates stably with excellent efficiency. A Wien filter according to an embodiment of the present invention comprises: a tubular yoke; a plurality of magnetic poles positioned along the inner circumferential surface of the yoke with gaps therebetween, one end of each of the plurality of magnetic poles being joined to the yoke; a coil wound on each of the plurality of magnetic poles; and an electrode provided to the other end of each of the plurality of magnetic poles with an insulator interposed therebetween. A recessed section is provided at the other end of each magnetic pole, and the insulator and the electrode may be positioned in the recessed section.
Inventors:
AKIBA TOSHIKATSU (JP)
Application Number:
PCT/JP2021/023343
Publication Date:
May 05, 2022
Filing Date:
June 21, 2021
Export Citation:
Assignee:
NUFLARE TECHNOLOGY INC (JP)
International Classes:
H01J37/05; H01J37/28; H01J37/29; H01L21/66
Domestic Patent References:
| WO2019187118A1 | 2019-10-03 |
Foreign References:
| JP2001023564A | 2001-01-26 | |||
| JP2001222969A | 2001-08-17 | |||
| JPH0479138A | 1992-03-12 | |||
| JP2020021733A | 2020-02-06 | |||
| US20130256530A1 | 2013-10-03 | |||
| JP2002532844A | 2002-10-02 | |||
| JPS5266487A | 1977-06-01 |
Attorney, Agent or Firm:
SHIGENO, Tsuyoshi et al. (JP)
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