Title:
WINDOW PORTION WITH AN ADJUSTED RATE OF WEAR
Document Type and Number:
WIPO Patent Application WO2001068322
Kind Code:
A9
Abstract:
A polishing pad includes a polishing layer, and a transparent window portion of the polishing layer having dispersed particles, to increase the rate at which the window portion wears away during a polishing operation, and to avoid forming a lump in the polishing layer.
Inventors:
BUDINGER WILLIAM D
KUBO NAOTO
KUBO NAOTO
Application Number:
PCT/US2001/008026
Publication Date:
December 19, 2002
Filing Date:
March 13, 2001
Export Citation:
Assignee:
RODEL INC (US)
International Classes:
B24B37/20; B24B49/12; B24D7/12; B24D13/14; H01L21/304; (IPC1-7): B24B37/04; B24D13/12; B24D13/14; B24D7/12; B24D11/00
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