Title:
WIRE CASSETTE AND SUBSTRATE TRANSFER APPARATUS USING SAME
Document Type and Number:
WIPO Patent Application WO/2011/155293
Kind Code:
A1
Abstract:
Disclosed is a wire cassette wherein an inside contact with a wire cassette main body section is simply suppressed at the time of carrying out a substrate. The wire cassette (100) which houses the substrate (10) is provided with: the cassette main body section (20) having the substrate (10) disposed therein; a bottom surface opening (27) formed in the bottom surface of the cassette main body section (20); and a loader (30), which is inserted from the bottom surface opening (27), and which carries in/out the substrate (10). The loader (30) is provided with a conveyer section (34) which carries out the substrate (10), and the conveyer section (34) is provided with an interference sensor (50) which detects interference with the inside of the cassette main body section (20).
Inventors:
ASAKURA, Kenji (())
Application Number:
JP2011/061418
Publication Date:
December 15, 2011
Filing Date:
May 18, 2011
Export Citation:
Assignee:
SHARP KABUSHIKI KAISHA (22-22, Nagaike-cho Abeno-ku, Osaka-sh, Osaka 22, 〒5458522, JP)
シャープ株式会社 (〒22 大阪府大阪市阿倍野区長池町２２番２２号 Osaka, 〒5458522, JP)
シャープ株式会社 (〒22 大阪府大阪市阿倍野区長池町２２番２２号 Osaka, 〒5458522, JP)
International Classes:
H01L21/677; B65G49/06
Attorney, Agent or Firm:
TESHIMA Masaru (Teshima Patent Law Firm, 5F MF MinamiMorimachi Bldg. 2-3-8, Tenjinbashi, Kita-ku, Osaka-sh, Osaka 41, 〒5300041, JP)
Claims:
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