Title:
WIRE SAW
Document Type and Number:
WIPO Patent Application WO/2013/018556
Kind Code:
A1
Abstract:
The wire saw is provided with: multiple processing rollers (11A, 11B) across which the wire (12) for processing the workpiece is suspended; supply side bobbins (13A, 13B) that rotate to supply the wire (12) between the processing rollers (11A, 11B); and winding side bobbins (13B, 13A) that rotate to wind the wire (12) from between the processing rollers (11A, 11B). The wire saw is equipped with: a pair of traversing mechanisms (16) that cause the two bobbins (13A, 13B) to traverse in the directions of the respective rotational axes; a pair of sensors (18) that respectively detect the tension on the wire (12) between a processing roller (11A, 11B) and a bobbin (13A, 13B); and a pair of tension-adjusting mechanisms (17) that respectively move the bobbins (13A, 13B) so as to adjust the tension of the wire (12) on the basis of the sensor (18) detection results.
Inventors:
ABE KATSUHIKO (JP)
NAGAI TOSHIKI (JP)
NAGAI TOSHIKI (JP)
Application Number:
PCT/JP2012/068388
Publication Date:
February 07, 2013
Filing Date:
July 19, 2012
Export Citation:
Assignee:
KOMATSU NTC LTD (JP)
ABE KATSUHIKO (JP)
NAGAI TOSHIKI (JP)
ABE KATSUHIKO (JP)
NAGAI TOSHIKI (JP)
International Classes:
B24B27/06; B28D5/04; H01L21/304
Foreign References:
| JPH04135158A | 1992-05-08 | |||
| JP2004122287A | 2004-04-22 | |||
| JP2010208010A | 2010-09-24 |
Attorney, Agent or Firm:
ONDA, Hironori et al. (JP)
Hironori Onda (JP)
Hironori Onda (JP)
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Claims: