Title:
WORK TRANSFER MEANS
Document Type and Number:
WIPO Patent Application WO/2005/011927
Kind Code:
A1
Abstract:
PROBLEMS TO BE SOLVED: To detect the lower dead point of a suction section simply and reliably in a work transfer means used in picking up work, such as a semiconductor chip, without constructing the suction section so that the latter is capable of lifting and lowering by separating the main body and the suction section and even if the suction section is composed of an elastic body. SOLUTION: A work transfer means (10) has a suction section (12) fixed to the lower end of a main body (11), with a flow rate sensor (14) placed somewhere between the ends of a pipe (13) that supplies a vacuum suction force or compressed air to the suction section (12). The work transfer means (10) is lowered while supplying a vacuum suction force or compressed air to the suction section (12), until the suction section (12) contacts an object, such as a semiconductor chip, whereupon the flow rate sensor (14) detects a change in the flow rate of ambient air, nitrogen or compressed air caused by the vacuum suction force; thus, the work transfer means (10) reaching the lower dead point can be detected.
Inventors:
KITAMURA SHOJI (JP)
Application Number:
PCT/JP2003/009670
Publication Date:
February 10, 2005
Filing Date:
July 30, 2003
Export Citation:
Assignee:
NEC MACHINERY CORP (JP)
KITAMURA CORP (JP)
KITAMURA CORP (JP)
International Classes:
H01L21/683; H05K13/04; (IPC1-7): B25J15/06; B65G49/07; H01L21/68
Foreign References:
| JPH06204266A | 1994-07-22 | |||
| JP2000033589A | 2000-02-02 |
Attorney, Agent or Firm:
Ehara, Syogo (15-26 Edobori 1-chome, Nishi-k, Osaka-shi Osaka, JP)
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