Title:
WORKED SURFACE MEASURING SYSTEM AND METHOD OF SEMICONTINUOUS PROCESSING AND MEASUREMENT OF WORKED SURFACE USING SAME
Document Type and Number:
WIPO Patent Application WO/2011/096090
Kind Code:
A1
Abstract:
Since a large-sized optical element has a very long focal point distance, a worked surface and a measuring device need to be installed distantly spaced apart using an elongated frame structure in order to measure the worked surface. However, since the elongated frame structure has a residual inherent oscillation, sufficient time has conventionally been required for the measurement in order to statistically reduce the variation of measured values. Disclosed is a worked surface measuring system wherein a vibration control device is provided near the measuring device, and the vibration is controlled at 1 µm or less along the plane orthogonal to the direction connecting the measuring device and the worked surface.
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Inventors:
KINO, Masaru (C/O NATIONAL UNIVERSITY CORPORATION NAGOYA UNIVERSITY, 1 Furo-cho, Chikusa-ku, Nagoya-sh, Aichi 01, 〒4648601, JP)
木野勝 (〒01 愛知県名古屋市千種区不老町１番国立大学法人名古屋大学内 Aichi, 〒4648601, JP)
KURITA, Mikio (C/O NATIONAL UNIVERSITY CORPORATION NAGOYA UNIVERSITY, 1 Furo-cho, Chikusa-ku, Nagoya-sh, Aichi 01, 〒4648601, JP)
木野勝 (〒01 愛知県名古屋市千種区不老町１番国立大学法人名古屋大学内 Aichi, 〒4648601, JP)
KURITA, Mikio (C/O NATIONAL UNIVERSITY CORPORATION NAGOYA UNIVERSITY, 1 Furo-cho, Chikusa-ku, Nagoya-sh, Aichi 01, 〒4648601, JP)
Application Number:
JP2010/052124
Publication Date:
August 11, 2011
Filing Date:
February 08, 2010
Export Citation:
Assignee:
NANO-OPTONICS ENERGY, INC. (Venture Business Laboratory, Kyoto University Yoshida-honmachi, Sakyou-ku, Kyoto-sh, Kyoto 01, 〒6068501, JP)
株式会社ナノオプトニクス・エナジー (〒01 京都府京都市左京区吉田本町京都大学ベンチャー・ビジネス・ラボラトリー Kyoto, 〒6068501, JP)
NATIONAL UNIVERSITY CORPORATION NAGOYA UNIVERSITY (1 Furo-cho, Chikusa-ku Nagoya-sh, Aichi 01, 〒4648601, JP)
国立大学法人名古屋大学 (〒01 愛知県名古屋市千種区不老町１番 Aichi, 〒4648601, JP)
KINO, Masaru (C/O NATIONAL UNIVERSITY CORPORATION NAGOYA UNIVERSITY, 1 Furo-cho, Chikusa-ku, Nagoya-sh, Aichi 01, 〒4648601, JP)
株式会社ナノオプトニクス・エナジー (〒01 京都府京都市左京区吉田本町京都大学ベンチャー・ビジネス・ラボラトリー Kyoto, 〒6068501, JP)
NATIONAL UNIVERSITY CORPORATION NAGOYA UNIVERSITY (1 Furo-cho, Chikusa-ku Nagoya-sh, Aichi 01, 〒4648601, JP)
国立大学法人名古屋大学 (〒01 愛知県名古屋市千種区不老町１番 Aichi, 〒4648601, JP)
KINO, Masaru (C/O NATIONAL UNIVERSITY CORPORATION NAGOYA UNIVERSITY, 1 Furo-cho, Chikusa-ku, Nagoya-sh, Aichi 01, 〒4648601, JP)
International Classes:
G01B11/24; B24B13/00; B24B49/12
Attorney, Agent or Firm:
KANOH, Akira (4F Kimura Building, 1-19-1 Kanda-Awaji-cho, Chiyoda-k, Tokyo 63, 〒1010063, JP)
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Claims: