Title:
WORKING DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/216203
Kind Code:
A1
Abstract:
[Problem] To provide a catalyst-referred planarization device which does not require a heater for heating a working fluid. [Solution] A catalyst-referred planarization device that, under the presence of a working fluid L which promotes a catalytic reaction, brings the surface of a wafer W into contact with or close to a surface of a pad 9 that has a catalyst layer on the surface and causes the wafer W and the pad 9 to move relatively to each other by only an amount by which the surface of the wafer W can be planarized by the catalytic reaction. An ultraviolet light emitting LED 8 that outputs ultraviolet radiation toward the surface of the wafer W is provided inside a retainer 7, and the working fluid L is heated by the heat generated from the LED 8 being radiated into the working fluid L, while the LED 8 is cooled simultaneously.
Inventors:
SUZUKI EISUKE (JP)
SUZUKI DAISUKE (JP)
SUZUKI TATSUTOSHI (JP)
SUZUKI DAISUKE (JP)
SUZUKI TATSUTOSHI (JP)
Application Number:
PCT/JP2019/017234
Publication Date:
November 14, 2019
Filing Date:
April 23, 2019
Export Citation:
Assignee:
TOHO ENG CO LTD (JP)
International Classes:
H01L21/306; H01L21/304
Foreign References:
| JP2017183358A | 2017-10-05 | |||
| JP2006121031A | 2006-05-11 | |||
| JP2011129596A | 2011-06-30 | |||
| JP2015173216A | 2015-10-01 |
Attorney, Agent or Firm:
MORITA Kenichi (JP)
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